{"id":345,"date":"2016-05-12T13:26:21","date_gmt":"2016-05-12T13:26:21","guid":{"rendered":"http:\/\/pfi.ftmc.lt\/?page_id=345"},"modified":"2019-05-31T10:44:28","modified_gmt":"2019-05-31T10:44:28","slug":"vup-magnetroninio-dulkinimo-ir-terminio-garinimo-irenginiai","status":"publish","type":"page","link":"https:\/\/pfi.ftmc.lt\/?page_id=345&lang=lt","title":{"rendered":"VUP magnetroninio dulkinimo ir terminio garinimo \u012frenginiai"},"content":{"rendered":"\n<p><span lang=\"lt-LT\">Magnetroninio dulkinimo \u012frenginys VUP-5M<\/span>&nbsp; naudojamas<span lang=\"ru-RU\"> \u012f<\/span>vairi<span lang=\"ru-RU\">\u0173<\/span><span lang=\"lt-LT\"> stori\u0173 (3 \u00f7 300nm) metalini\u0173 (<\/span><span lang=\"lt-LT\">Au, Ag, Cu, In, Mo, Ni, Pd, Pt, Ru, Sn, Ti, Ir<\/span><span lang=\"lt-LT\">)\u2013arba\/ir metalo oksid\u0173 (<\/span><span lang=\"lt-LT\"> In<\/span><span lang=\"lt-LT\">2<\/span><span lang=\"lt-LT\">O<\/span><span lang=\"lt-LT\">3<\/span><span lang=\"lt-LT\">, SnO<\/span><span lang=\"lt-LT\">2<\/span><span lang=\"lt-LT\">, TiO<\/span><span lang=\"lt-LT\">2<\/span><span lang=\"lt-LT\">) sluoksni\u0173 auginimui ant plok\u0161\u010di\u0173 pavir\u0161i\u0173 (S&lt; 6cm<\/span><span lang=\"lt-LT\">2<\/span><span lang=\"lt-LT\">) magnetroninio dulkinimo b\u016bdu i\u0161 metalini\u0173 taikini\u0173. Trij\u0173 magnetron\u0173 sistema leid\u017eia paeiliui auginti trij\u0173 skirting\u0173 med\u017eiag\u0173 sluoksnius, nei\u0161hermetinant darbinio t\u016brio. Pagal poreikius bandini\u0173 tvirtinimo staliukas gali b\u016bti kaitinamas iki 350<\/span><span lang=\"lt-LT\">0<\/span><span lang=\"lt-LT\">C. <\/span><\/p>\n\n\n\n<p><span lang=\"lt-LT\">Vakuuminio garinimo \u012frenginys VUP-5<\/span><span lang=\"lt-LT\">&nbsp; naudojamas \u012fvairi\u0173 stori\u0173 (10nm\u00f7250nm) metalini\u0173 (<\/span><span lang=\"lt-LT\">Ag, Au, Au:Ge, Cr<\/span><span lang=\"lt-LT\">) sluoksni\u0173 garinimui terminiu b\u016bdu i\u0161 molibdeno arba volframo garintuv\u0173. Nei\u0161hermetinant darbinio t\u016brio galima paeiliui garinti i\u0161 dviej\u0173 garintuv\u0173. Maksimalus bandinio skersmuo &#8211; 10cm. Pagal poreikius bandini\u0173 tvirtinimo staliukas gali b\u016bti kaitinamas iki 350<\/span><span lang=\"lt-LT\">0<\/span><span lang=\"lt-LT\">C.<\/span><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Magnetroninio dulkinimo \u012frenginys VUP-5M&nbsp; naudojamas \u012fvairi\u0173 stori\u0173 (3 \u00f7 300nm) metalini\u0173 (Au, Ag, Cu, In, Mo, Ni, Pd, Pt, Ru, Sn, Ti, Ir)\u2013arba\/ir metalo oksid\u0173 ( In2O3, SnO2, TiO2) sluoksni\u0173 auginimui ant plok\u0161\u010di\u0173 pavir\u0161i\u0173 (S&lt; 6cm2) magnetroninio dulkinimo b\u016bdu i\u0161 metalini\u0173 taikini\u0173. Trij\u0173 magnetron\u0173 sistema leid\u017eia paeiliui auginti trij\u0173 skirting\u0173 med\u017eiag\u0173 sluoksnius, nei\u0161hermetinant darbinio t\u016brio.&hellip;<\/p>\n<p class=\"more-link-wrapper\"><a class=\"more-link\" href=\"https:\/\/pfi.ftmc.lt\/?page_id=345&#038;lang=lt\">Continue<\/a><\/p>\n","protected":false},"author":2,"featured_media":0,"parent":597,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-templates\/template-fullwidth.php","meta":{"footnotes":""},"class_list":["post-345","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/345","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=345"}],"version-history":[{"count":3,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/345\/revisions"}],"predecessor-version":[{"id":1096,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/345\/revisions\/1096"}],"up":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/597"}],"wp:attachment":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=345"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}