{"id":575,"date":"2017-05-04T04:57:21","date_gmt":"2017-05-04T04:57:21","guid":{"rendered":"http:\/\/pfi.ftmc.lt\/?page_id=575"},"modified":"2019-05-31T10:41:20","modified_gmt":"2019-05-31T10:41:20","slug":"molekulinio-pluostelio-epitaksija-svt","status":"publish","type":"page","link":"https:\/\/pfi.ftmc.lt\/?page_id=575&lang=lt","title":{"rendered":"Molekulini\u0173 pluo\u0161teli\u0173 epitaksijos kambarys I"},"content":{"rendered":"\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"285\" src=\"http:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/MBE-SVTa-300x285.jpg\" alt=\"\" class=\"wp-image-614\" srcset=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/MBE-SVTa-300x285.jpg 300w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/MBE-SVTa-1024x974.jpg 1024w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/MBE-SVTa-250x238.jpg 250w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/MBE-SVTa-550x523.jpg 550w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/MBE-SVTa-800x761.jpg 800w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/MBE-SVTa-189x180.jpg 189w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/MBE-SVTa-315x300.jpg 315w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/MBE-SVTa-526x500.jpg 526w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/MBE-SVTa.jpg 1122w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/figure>\n\n\n\n<p>Molekulini\u0173 pluo\u0161teli\u0173 epitaksijos (MBE) \u012franga modelis SVT-V-2<\/p>\n\n\n\n<p>Skirta AIII-BV puslaidininkini\u0173 jungini\u0173 auginimui<\/p>\n\n\n\n<p><strong>Specifikacijos<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\"><li>7 \u0161altiniai<\/li><li>III grup\u0117: In, Ga ir Al<\/li><li>V grup\u0117: As ir Bi<\/li><li><span lang=\"en-US\">Skaldiklis su vo\u017etuvu As<\/span><span lang=\"en-US\"><sub>2 <\/sub><\/span><span lang=\"en-US\">formuoti<\/span><\/li><li>Legirantai: n-tipui \u2013 Si, p-tipui &#8211; Be<\/li><li>Pad\u0117klo temperat\u016bra iki 1000 \u00b0C<\/li><li><span lang=\"en-US\">Storio nuokrypis <\/span><span lang=\"en-US\"> 1% 2&#8243; pad\u0117klui<\/span><\/li><li>Greitaveik\u0117s sklend\u0117s<\/li><li>Pagrindin\u0117 sklend\u0117<\/li><li>Konfig\u016bracija: \u012fkrovos ir auginimo kameros<\/li><li><span lang=\"en-US\">Auginimo modulis <\/span><span lang=\"en-US\">turi integruot\u0105 joninio siurblio su titaniniu sublimatoriumi sistem\u0105 (bazinis vakuumas 5&#215;10<\/span><span lang=\"en-US\"><sup>-9<\/sup><\/span><span lang=\"en-US\"> Torr)<\/span><\/li><li><span lang=\"en-US\">\u012ekrovos kamera<\/span><span lang=\"en-US\"> vakuumuojama turbo molekuliniu ir bealyviu rotaciniu siurbliais (bazinis vakuumas 5&#215;10<\/span><span lang=\"en-US\"><sup>-8<\/sup><\/span><span lang=\"en-US\"> Torr)<\/span><\/li><li><span lang=\"en-US\">RoboMBE <\/span><span lang=\"en-US\">proces\u0173 automatizavimo sistema<\/span><\/li><\/ul>\n\n\n\n<h3 class=\"wp-block-heading\" id=\"2\">Darb\u0173 pavyzd\u017eiai<\/h3>\n\n\n\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" width=\"630\" height=\"803\" src=\"http:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/diodas.jpg\" alt=\"\" class=\"wp-image-578\" srcset=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/diodas.jpg 630w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/diodas-235x300.jpg 235w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/diodas-250x319.jpg 250w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/diodas-550x701.jpg 550w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/diodas-141x180.jpg 141w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/diodas-392x500.jpg 392w\" sizes=\"auto, (max-width: 630px) 100vw, 630px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" width=\"632\" height=\"301\" src=\"http:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/nanodaleles.jpg\" alt=\"\" class=\"wp-image-579\" srcset=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/nanodaleles.jpg 632w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/nanodaleles-300x143.jpg 300w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/nanodaleles-250x119.jpg 250w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/nanodaleles-550x262.jpg 550w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/nanodaleles-378x180.jpg 378w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/nanodaleles-630x300.jpg 630w\" sizes=\"auto, (max-width: 632px) 100vw, 632px\" \/><\/figure>\n","protected":false},"excerpt":{"rendered":"<p>Molekulini\u0173 pluo\u0161teli\u0173 epitaksijos (MBE) \u012franga modelis SVT-V-2 Skirta AIII-BV puslaidininkini\u0173 jungini\u0173 auginimui Specifikacijos 7 \u0161altiniai III grup\u0117: In, Ga ir Al V grup\u0117: As ir Bi Skaldiklis su vo\u017etuvu As2 formuoti Legirantai: n-tipui \u2013 Si, p-tipui &#8211; Be Pad\u0117klo temperat\u016bra iki 1000 \u00b0C Storio nuokrypis 1% 2&#8243; pad\u0117klui Greitaveik\u0117s sklend\u0117s Pagrindin\u0117 sklend\u0117 Konfig\u016bracija: \u012fkrovos ir&hellip;<\/p>\n<p class=\"more-link-wrapper\"><a class=\"more-link\" href=\"https:\/\/pfi.ftmc.lt\/?page_id=575&#038;lang=lt\">Continue<\/a><\/p>\n","protected":false},"author":2,"featured_media":0,"parent":1061,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-templates\/template-fullwidth.php","meta":{"footnotes":""},"class_list":["post-575","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/575","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=575"}],"version-history":[{"count":12,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/575\/revisions"}],"predecessor-version":[{"id":1092,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/575\/revisions\/1092"}],"up":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/1061"}],"wp:attachment":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=575"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}