{"id":583,"date":"2017-05-04T05:22:48","date_gmt":"2017-05-04T05:22:48","guid":{"rendered":"http:\/\/pfi.ftmc.lt\/?page_id=583"},"modified":"2019-05-31T10:41:35","modified_gmt":"2019-05-31T10:41:35","slug":"molekuliniu-pluosteliu-epitaksijos-mpe-sistema-veeco-genxplor","status":"publish","type":"page","link":"https:\/\/pfi.ftmc.lt\/?page_id=583&lang=lt","title":{"rendered":"Molekulini\u0173 pluo\u0161teli\u0173 epitaksijos kambarys II"},"content":{"rendered":"\n<div class=\"wp-block-image\"><figure class=\"aligncenter\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"166\" src=\"http:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/DSC_0632-300x166.jpg\" alt=\"\" class=\"wp-image-610\" srcset=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/DSC_0632-300x166.jpg 300w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/DSC_0632-1024x567.jpg 1024w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/DSC_0632-250x138.jpg 250w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/DSC_0632-550x304.jpg 550w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/DSC_0632-800x443.jpg 800w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/DSC_0632-325x180.jpg 325w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/DSC_0632-542x300.jpg 542w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/DSC_0632-903x500.jpg 903w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/DSC_0632.jpg 1234w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/figure><\/div>\n\n\n\n<p>Molekulini\u0173 pluo\u0161teli\u0173 epitaksijos (MPE) sistema Veeco GENxplor<\/p>\n\n\n\n<p>Veeco GENxplor moksliniams tyrimams ir technologinei pl\u0117trai skirtoje molekulini\u0173 pluo\u0161teli\u0173 epitaksijos sistemoje pritaikytas patikimas GEN10 MPE sistemos auginimo kameros dizainas bei didelis proceso lankstumas, puikiai tinka kiek gerai \u017einom\u0173, tiek ir nauj\u0173j\u0173 med\u017eiag\u0173 technologijos vystymui. GENxplor MPE sistema yra skirta auk\u0161tos kokyb\u0117s III-V jungini\u0173 epitaksiniam auginimui ant pad\u0117kl\u0173 iki 3 coli\u0173 diametro esant labai auk\u0161tam auginimo parametr\u0173 valdymo tikslumui. MPE reaktoriuje yra \u012fdiegta 10 med\u017eiag\u0173 \u0161altini\u0173:<\/p>\n\n\n\n<p><strong>Specifikacijos<\/strong><\/p>\n\n\n\n<p>III-os grup\u0117s elementai<\/p>\n\n\n\n<ul class=\"wp-block-list\"><li>Indis;<\/li><li>Galis (2 \u0161altiniai);<\/li><li>Aliuminis;<\/li><\/ul>\n\n\n\n<p>V-os grup\u0117 elementai<\/p>\n\n\n\n<ul class=\"wp-block-list\"><li>Arseno auk\u0161tatemperat\u016brinio skaldymo \u0161altinis su vo\u017etuvu;<\/li><li>Stibio auk\u0161tatemperat\u016brinio skaldymo \u0161altinis su vo\u017etuvu;<\/li><li>Bismutas<\/li><\/ul>\n\n\n\n<p>Legiravimo \u0161altiniai<\/p>\n\n\n\n<ul class=\"wp-block-list\"><li>Silicis;<\/li><li>Tel\u016bras;<\/li><li>Berilis.<\/li><\/ul>\n\n\n\n<p>Auginimo kameroje yra \u012frengti integruotas joninis ir titano sublimacinis siurbliai bei u\u017edaro ciklo helio kriogeninis siurblys, tuo tarpu paruo\u0161imo kameroje yra \u012frengtas joninis siurblys, o pakrovimo kameroje turbomolekulinis siurblys. \u0160i galinga ir efektyvi ultraauk\u0161to vakumo siurbimo sistema padeda i\u0161laikyti itin \u0161var\u0173 vakuumin\u012f fon\u0105 auginimo ir paruo\u0161imo kamerose leid\u017eiant auginti itin auk\u0161tos kokyb\u0117s med\u017eiagas, tinkan\u010dias panaudojimui optoelektronikoje.<\/p>\n\n\n\n<p>Molly\u00ae programin\u0117 \u012franga apjungia palengvint\u0105 auginimo program\u0173 ra\u0161ym\u0105, automatizuot\u0105 auginimo valdym\u0105 bei nenutr\u016bkstam\u0105 duomen\u0173 \u012fra\u0161ym\u0105.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Molekulini\u0173 pluo\u0161teli\u0173 epitaksijos (MPE) sistema Veeco GENxplor Veeco GENxplor moksliniams tyrimams ir technologinei pl\u0117trai skirtoje molekulini\u0173 pluo\u0161teli\u0173 epitaksijos sistemoje pritaikytas patikimas GEN10 MPE sistemos auginimo kameros dizainas bei didelis proceso lankstumas, puikiai tinka kiek gerai \u017einom\u0173, tiek ir nauj\u0173j\u0173 med\u017eiag\u0173 technologijos vystymui. GENxplor MPE sistema yra skirta auk\u0161tos kokyb\u0117s III-V jungini\u0173 epitaksiniam auginimui ant pad\u0117kl\u0173&hellip;<\/p>\n<p class=\"more-link-wrapper\"><a class=\"more-link\" href=\"https:\/\/pfi.ftmc.lt\/?page_id=583&#038;lang=lt\">Continue<\/a><\/p>\n","protected":false},"author":2,"featured_media":0,"parent":1061,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-templates\/template-fullwidth.php","meta":{"footnotes":""},"class_list":["post-583","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/583","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=583"}],"version-history":[{"count":7,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/583\/revisions"}],"predecessor-version":[{"id":1093,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/583\/revisions\/1093"}],"up":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/1061"}],"wp:attachment":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=583"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}