{"id":586,"date":"2017-05-04T05:34:20","date_gmt":"2017-05-04T05:34:20","guid":{"rendered":"http:\/\/pfi.ftmc.lt\/?page_id=586"},"modified":"2019-05-31T10:42:59","modified_gmt":"2019-05-31T10:42:59","slug":"elektronio-spindulio-e-beam-garinimo-irenginys-vst-model-tfds-870","status":"publish","type":"page","link":"https:\/\/pfi.ftmc.lt\/?page_id=586&lang=lt","title":{"rendered":"Elektroninio spindulio (E-beam) garinimo \u012frenginys (VST Model TFDS\u2013870)"},"content":{"rendered":"\n<div class=\"wp-block-image\"><figure class=\"aligncenter\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"224\" src=\"http:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/20170131_075553-300x224.jpg\" alt=\"\" class=\"wp-image-608\" srcset=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/20170131_075553-300x224.jpg 300w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/20170131_075553-250x187.jpg 250w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/20170131_075553-550x411.jpg 550w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/20170131_075553-800x598.jpg 800w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/20170131_075553-241x180.jpg 241w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/20170131_075553-402x300.jpg 402w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/20170131_075553-669x500.jpg 669w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/20170131_075553.jpg 965w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/figure><\/div>\n\n\n\n<p>Elektroninio spindulio (E-beam) garinimo \u012frenginys skirtas plon\u0173 metal\u0173 sluoksni\u0173 formavimui auk\u0161tame vakuume.<\/p>\n\n\n\n<p><strong>Specifikacijos<\/strong><\/p>\n\n\n\n<p><span lang=\"lt-LT\">E-Beam garinimo \u012frengin\u012f sudaro \u201eGlove box\u201c ir auginimo kamera. Pirmiausiai bandiniai \u012fne\u0161ami \u012f \u201eGlove box\u201c, kuris u\u017epildytas azoto dujomis. Auginimo kamera skirta bandini\u0173 padengimui plonais \u012fvairi\u0173 med\u017eiag\u0173 sluoksniais bei kontakt\u0173 garinimui. <\/span><\/p>\n\n\n\n<ul class=\"wp-block-list\"><li><span lang=\"lt-LT\">Kameroje vakuumo lygis \u2013 8<span lang=\"en-US\">x10<\/span><span lang=\"en-US\"><sup>-8<\/sup><\/span> <\/span><span lang=\"lt-LT\"> Torr.<\/span><\/li><li><span lang=\"lt-LT\">Turime aukso (Au), aukso germanio mi\u0161inio (AuGe12%), germanio (Ge), nikelio (Ni), titano (Ti) bei aliuminio (Al) \u0161altinius. <\/span><\/li><li><span lang=\"lt-LT\">Maksimalus bandini\u0173 dydis iki 2 coli\u0173 diametro. <\/span><\/li><li><span lang=\"lt-LT\">Bandini\u0173 laikikliai turi po keturis prispaudimus, tod\u0117l jei bandiniai ma\u017eesni\u0173 matmen\u0173, vienu metu galima sud\u0117ti iki 4 bandini\u0173 (bendras plotas neturi vir\u0161yti 2 coli\u0173). <\/span><\/li><li><span lang=\"lt-LT\">Taip pat yra galimyb\u0117 pad\u0117klus pakaitinti iki 150 <\/span><span lang=\"lt-LT\"><sup>o<\/sup><\/span><span lang=\"lt-LT\">C. <\/span><\/li><li><span lang=\"lt-LT\">Bandini\u0173 laikikl\u012f galima sukti (0 \u2013 28 aps\/min), kas u\u017etikrina dengiamo sluoksnio tolygum\u0105 ant bandinio. <\/span><\/li><li><span lang=\"lt-LT\">Plono sluoksnio dengimo greitis ir storis matuojamas su Telemark kontroleriu (Model 880). Jo parametrai: atlieka de\u0161imt matavim\u0173 per sekunde, tikslumas \u2013 <\/span><span lang=\"lt-LT\"> storiui \u00b10.5% plius 1 ma\u017eiausiai reik\u0161mingas skaitmuo, jutiklio kristalo darbinis da\u017enis 6 MHz, Hz (5 MHz \u2013 6 MHz). Da\u017eniausiai naudojamas dengimo greitis \u2013 2 A\/s.<\/span><\/li><li><span lang=\"lt-LT\">Bandini\u0173, turin\u010di\u0173 savo sud\u0117tyje cinko (Zn), naudojimas grie\u017etai draud\u017eiamas<\/span><span lang=\"lt-LT\">!<\/span><\/li><\/ul>\n\n\n\n<h3 class=\"wp-block-heading\" id=\"2\">Darb\u0173 pavyzd\u017eiai<\/h3>\n\n\n\n<ul class=\"wp-block-gallery columns-5 is-cropped wp-block-gallery-1 is-layout-flex wp-block-gallery-is-layout-flex\"><li class=\"blocks-gallery-item\"><figure><img loading=\"lazy\" decoding=\"async\" width=\"949\" height=\"1028\" src=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM1.jpeg\" alt=\"\" data-id=\"591\" class=\"wp-image-591\" srcset=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM1.jpeg 949w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM1-277x300.jpeg 277w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM1-945x1024.jpeg 945w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM1-250x271.jpeg 250w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM1-550x596.jpeg 550w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM1-800x867.jpeg 800w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM1-166x180.jpeg 166w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM1-462x500.jpeg 462w\" sizes=\"auto, (max-width: 949px) 100vw, 949px\" \/><\/figure><\/li><li class=\"blocks-gallery-item\"><figure><img loading=\"lazy\" decoding=\"async\" width=\"1280\" height=\"1040\" src=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM2.jpeg\" alt=\"\" data-id=\"592\" class=\"wp-image-592\" srcset=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM2.jpeg 1280w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM2-300x244.jpeg 300w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM2-1024x832.jpeg 1024w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM2-250x203.jpeg 250w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM2-550x447.jpeg 550w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM2-800x650.jpeg 800w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM2-222x180.jpeg 222w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM2-369x300.jpeg 369w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-SEM2-615x500.jpeg 615w\" sizes=\"auto, (max-width: 1280px) 100vw, 1280px\" \/><\/figure><\/li><li class=\"blocks-gallery-item\"><figure><img loading=\"lazy\" decoding=\"async\" width=\"1036\" height=\"1104\" src=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo1.jpeg\" alt=\"\" data-id=\"593\" class=\"wp-image-593\" srcset=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo1.jpeg 1036w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo1-282x300.jpeg 282w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo1-961x1024.jpeg 961w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo1-250x266.jpeg 250w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo1-550x586.jpeg 550w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo1-800x853.jpeg 800w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo1-169x180.jpeg 169w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo1-469x500.jpeg 469w\" sizes=\"auto, (max-width: 1036px) 100vw, 1036px\" \/><\/figure><\/li><li class=\"blocks-gallery-item\"><figure><img loading=\"lazy\" decoding=\"async\" width=\"1908\" height=\"1104\" src=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo2.jpeg\" alt=\"\" data-id=\"594\" class=\"wp-image-594\" srcset=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo2.jpeg 1908w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo2-300x174.jpeg 300w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo2-1024x593.jpeg 1024w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo2-250x145.jpeg 250w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo2-550x318.jpeg 550w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo2-800x463.jpeg 800w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo2-311x180.jpeg 311w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo2-518x300.jpeg 518w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2017\/05\/GaN-AlGaN-photo2-864x500.jpeg 864w\" sizes=\"auto, (max-width: 1908px) 100vw, 1908px\" \/><\/figure><\/li><\/ul>\n","protected":false},"excerpt":{"rendered":"<p>Elektroninio spindulio (E-beam) garinimo \u012frenginys skirtas plon\u0173 metal\u0173 sluoksni\u0173 formavimui auk\u0161tame vakuume. Specifikacijos E-Beam garinimo \u012frengin\u012f sudaro \u201eGlove box\u201c ir auginimo kamera. Pirmiausiai bandiniai \u012fne\u0161ami \u012f \u201eGlove box\u201c, kuris u\u017epildytas azoto dujomis. Auginimo kamera skirta bandini\u0173 padengimui plonais \u012fvairi\u0173 med\u017eiag\u0173 sluoksniais bei kontakt\u0173 garinimui. Kameroje vakuumo lygis \u2013 8&#215;10-8 Torr. Turime aukso (Au), aukso germanio&hellip;<\/p>\n<p class=\"more-link-wrapper\"><a class=\"more-link\" href=\"https:\/\/pfi.ftmc.lt\/?page_id=586&#038;lang=lt\">Continue<\/a><\/p>\n","protected":false},"author":2,"featured_media":0,"parent":597,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-templates\/template-fullwidth.php","meta":{"footnotes":""},"class_list":["post-586","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/586","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=586"}],"version-history":[{"count":5,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/586\/revisions"}],"predecessor-version":[{"id":1098,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/586\/revisions\/1098"}],"up":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/597"}],"wp:attachment":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=586"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}