{"id":770,"date":"2018-07-11T14:15:43","date_gmt":"2018-07-11T14:15:43","guid":{"rendered":"http:\/\/pfi.ftmc.lt\/?page_id=770"},"modified":"2018-07-12T12:39:55","modified_gmt":"2018-07-12T12:39:55","slug":"molecular-beam-epitaxy","status":"publish","type":"page","link":"https:\/\/pfi.ftmc.lt\/?page_id=770&lang=en","title":{"rendered":"Molecular Beam Epitaxy Systems"},"content":{"rendered":"<h1>Compact MBE System Model SVT-V-2<\/h1>\n<p>Efficient use of MBE technique for materials research, namely, III-V compound semiconductors.<\/p>\n<h2>Features:<\/h2>\n<ul>\n<li>Small Footprint<\/li>\n<li><strong>7 Sources<br \/>\n<\/strong>Group III: In, Ga and Al<br \/>\nGroup V: As and Bi<br \/>\nValved cracker for As<sub>2<br \/>\n<\/sub>Dopants: for <em style=\"font-size: 0.875rem;\">n-<\/em><span style=\"font-size: 0.875rem;\">type \u2013 Si, for <\/span><em style=\"font-size: 0.875rem;\">p-<\/em><span style=\"font-size: 0.875rem;\">type Be<\/span><\/li>\n<li>Sample Temperature up to 1,000 \u00b0C<\/li>\n<li>Thickness uniformity 1% over 2&#8243; Wafer<\/li>\n<li>Fast Action Shutters<\/li>\n<li>Master Wafer Shutter<\/li>\n<li>Configuration: Load lock and Growth chamber<\/li>\n<li><strong>Growth module<\/strong> is equipped with the integrated Ion and Titanium sublimation pump system (base vacuum level 5&#215;10<sup>-9<\/sup> Torr)<\/li>\n<li>The <strong>load lock<\/strong> is equipped with the turbo molecular (base vacuum level 5&#215;10<sup>-8<\/sup> Torr)<\/li>\n<li><strong>RoboMBE Process Automation<\/strong> for Growth Recipe Operation<\/li>\n<\/ul>\n<h2>Growth samples:<\/h2>\n<p><strong><em>MQW-based Laser structure:<\/em><\/strong><\/p>\n<p>&nbsp;<\/p>\n<div id='gallery-1' class='gallery galleryid-770 gallery-columns-3 gallery-size-wcstandard'><figure class='gallery-item'>\n\t\t\t<div class='gallery-icon portrait'>\n\t\t\t\t<a href='https:\/\/pfi.ftmc.lt\/?attachment_id=779'><img loading=\"lazy\" decoding=\"async\" width=\"270\" height=\"372\" src=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/2.png\" class=\"attachment-wcstandard size-wcstandard\" alt=\"\" srcset=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/2.png 270w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/2-218x300.png 218w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/2-250x344.png 250w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/2-131x180.png 131w\" sizes=\"auto, (max-width: 270px) 100vw, 270px\" \/><\/a>\n\t\t\t<\/div><\/figure><figure class='gallery-item'>\n\t\t\t<div class='gallery-icon portrait'>\n\t\t\t\t<a href='https:\/\/pfi.ftmc.lt\/?attachment_id=774'><img loading=\"lazy\" decoding=\"async\" width=\"550\" height=\"638\" src=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/1-550x638.png\" class=\"attachment-wcstandard size-wcstandard\" alt=\"\" srcset=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/1-550x638.png 550w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/1-259x300.png 259w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/1-250x290.png 250w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/1-155x180.png 155w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/1-431x500.png 431w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/1.png 563w\" sizes=\"auto, (max-width: 550px) 100vw, 550px\" \/><\/a>\n\t\t\t<\/div><\/figure><figure class='gallery-item'>\n\t\t\t<div class='gallery-icon landscape'>\n\t\t\t\t<a href='https:\/\/pfi.ftmc.lt\/?attachment_id=776'><img loading=\"lazy\" decoding=\"async\" width=\"536\" height=\"412\" src=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/3.png\" class=\"attachment-wcstandard size-wcstandard\" alt=\"\" srcset=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/3.png 536w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/3-300x231.png 300w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/3-250x192.png 250w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/3-234x180.png 234w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/3-390x300.png 390w\" sizes=\"auto, (max-width: 536px) 100vw, 536px\" \/><\/a>\n\t\t\t<\/div><\/figure>\n\t\t<\/div>\n\n<p><strong><em>Bi NPs in the GaAsBi QW (HRTEM images):<\/em><\/strong><\/p>\n<p>&nbsp;<\/p>\n<div id='gallery-2' class='gallery galleryid-770 gallery-columns-2 gallery-size-thumbnail'><figure class='gallery-item'>\n\t\t\t<div class='gallery-icon landscape'>\n\t\t\t\t<a href='https:\/\/pfi.ftmc.lt\/?attachment_id=780'><img loading=\"lazy\" decoding=\"async\" width=\"131\" height=\"102\" src=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/6.png\" class=\"attachment-thumbnail size-thumbnail\" alt=\"\" \/><\/a>\n\t\t\t<\/div><\/figure><figure class='gallery-item'>\n\t\t\t<div class='gallery-icon landscape'>\n\t\t\t\t<a href='https:\/\/pfi.ftmc.lt\/?attachment_id=778'><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/5-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail\" alt=\"\" srcset=\"https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/5-150x150.jpg 150w, https:\/\/pfi.ftmc.lt\/wp-content\/uploads\/2018\/07\/5-48x48.jpg 48w\" sizes=\"auto, (max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t<\/div><\/figure>\n\t\t<\/div>\n\n<h1>MBE System\u00a0Veeco GENxplor R&amp;D<\/h1>\n<p>GENxplo MBE system is designed for the epitaxial growth of high quality III-V semiconductor compounds with very high deposition control accuracy on substrates up to 3\u2019\u2019 in diameter for R&amp;D and Small Scale Manufacturing purposes.<\/p>\n<h2>Features:<\/h2>\n<ul>\n<li><b>Extremely high composition and thickness accuracy (error &lt;1.5%);<\/b><\/li>\n<li><strong>10 Sources<br \/>\n<\/strong>Group III: In, 2xGa and Al<br \/>\nGroup V: As, Sb and Bi<br \/>\nValved cracker for Sb and As<sub>2<br \/>\n<\/sub>Dopants: for <em style=\"font-size: 0.875rem;\">n-<\/em><span style=\"font-size: 0.875rem;\">type \u2013 Si, Te, for <\/span><em style=\"font-size: 0.875rem;\">p-<\/em><span style=\"font-size: 0.875rem;\">type Be<\/span><\/li>\n<li>Sample Temperature up to 1,850 \u00b0C<\/li>\n<li>Fast Action Shutters<\/li>\n<li>Master Wafer Shutter<\/li>\n<li>Configuration: Load lock and Growth chamber<\/li>\n<li><strong>Growth module<\/strong> is equipped with the integrated Ion and Titanium sublimation pump system (base vacuum level 5&#215;10<sup>-9<\/sup> Torr)<\/li>\n<li>The <strong>load lock<\/strong> is equipped with the turbo molecular (base vacuum level 5&#215;10<sup>-8<\/sup> Torr)<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"<p>Compact MBE System Model SVT-V-2 Efficient use of MBE technique for materials research, namely, III-V compound semiconductors. Features: Small Footprint 7 Sources Group III: In, Ga and Al Group V: As and Bi Valved cracker for As2 Dopants: for n-type \u2013 Si, for p-type Be Sample Temperature up to 1,000 \u00b0C Thickness uniformity 1% over&hellip;<\/p>\n<p class=\"more-link-wrapper\"><a class=\"more-link\" href=\"https:\/\/pfi.ftmc.lt\/?page_id=770&#038;lang=en\">Continue<\/a><\/p>\n","protected":false},"author":9,"featured_media":0,"parent":661,"menu_order":4,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-770","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/770","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/users\/9"}],"replies":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=770"}],"version-history":[{"count":21,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/770\/revisions"}],"predecessor-version":[{"id":802,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/770\/revisions\/802"}],"up":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/661"}],"wp:attachment":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=770"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}