{"id":838,"date":"2018-11-19T13:07:40","date_gmt":"2018-11-19T13:07:40","guid":{"rendered":"http:\/\/pfi.ftmc.lt\/?page_id=838"},"modified":"2022-05-26T07:34:58","modified_gmt":"2022-05-26T07:34:58","slug":"apie-pfi","status":"publish","type":"page","link":"https:\/\/pfi.ftmc.lt\/?page_id=838&lang=lt","title":{"rendered":"Apie PFI"},"content":{"rendered":"\n<p>PFI stands for &#8220;Prototype Formation and Integration&#8221; and is an Open User Facility  at&nbsp;<a rel=\"noopener noreferrer\" href=\"http:\/\/www.ftmc.lt\/en?set_language=en\" target=\"_blank\">Center for Physical Sciences and Technology (FTMC)<\/a>, Lithuania. We offer a complete solution for Research and Development in semiconductor field covering III-V group elements. We have:<\/p>\n\n\n\n<p><b style=\"font-size: 0.875rem;\">Implemented ISO 9001 quality standards;<\/b><\/p>\n\n\n\n<p><b>ISO5 and ISO7 cleanroom facilities:<\/b><\/p>\n\n\n\n<p><b>Two molecular beam epitaxy reactors for III-V compounds;<\/b><\/p>\n\n\n\n<p><b>Thin film deposition<\/b><strong> and etching<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\"><li>Magnetron sputtering system<\/li><li>E-beam sputtering system<\/li><li>Double tube PECVD for SiNx, SiO2, Al2O3, SiC, graphene<\/li><li>Chlorine chemistry ICP RIE system<\/li><li>Fluorine chemistry RIE system<\/li><li>PECVD reactor for SiNx, SiO2 coatings<\/li><\/ul>\n\n\n\n<p><b>Lithography<\/b><\/p>\n\n\n\n<ul class=\"wp-block-list\"><li>Laser Lithography system  with 600nm resolution<\/li><li>Mask Aligner 0.8um resolution.<\/li><\/ul>\n\n\n\n<p><\/p>\n","protected":false},"excerpt":{"rendered":"<p>PFI stands for &#8220;Prototype Formation and Integration&#8221; and is an Open User Facility at&nbsp;Center for Physical Sciences and Technology (FTMC), Lithuania. We offer a complete solution for Research and Development in semiconductor field covering III-V group elements. We have: Implemented ISO 9001 quality standards; ISO5 and ISO7 cleanroom facilities: Two molecular beam epitaxy reactors for&hellip;<\/p>\n<p class=\"more-link-wrapper\"><a class=\"more-link\" href=\"https:\/\/pfi.ftmc.lt\/?page_id=838&#038;lang=lt\">Continue<\/a><\/p>\n","protected":false},"author":2,"featured_media":0,"parent":34,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-838","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/838","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=838"}],"version-history":[{"count":2,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/838\/revisions"}],"predecessor-version":[{"id":1216,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/838\/revisions\/1216"}],"up":[{"embeddable":true,"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=\/wp\/v2\/pages\/34"}],"wp:attachment":[{"href":"https:\/\/pfi.ftmc.lt\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=838"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}